Surface organization of homoepitaxial InP films grown by metalorganic vapor-phase epitaxy
We present a systematic study of the morphology of homoepitaxial InP films grown by metalorganic vapor-phase epitaxy which are imaged with ex situ atomic force microscopy. These films show a dramatic range of different surface morphologies as a function of the growth conditions and substrate (growth temperature, V/III ratio, and miscut angle
Gocalinska, A. et al.
Fecha de publicación:
10
2012